SNE ALPHA
Detail View →
SNE-3000MS
The standard of Table-top SEM
For more details, visit SNE-3000MS
Performance
| 15nm | 60.000X | SE Image |
The most appropriate Table-top SEM for the surface inspection with 10,000x of magnification which is main inspection range by SEM
Entry-level Table-top SEM with 15nm resolution & 60,000x magnification
Compare: SNE-4500M Plus
SE (Secondary Electron)
- Create images with the height level information. Mostly used for surface inspection
[caption id="attachment_3456" align="alignnone" width="1000"]
Bề mặt pin được kiểm tra dưới kính hiển vi điện tử quét SEM[/caption]
Convenience
| Stage System X,Y,R (3-axis) Beam Shift: 150μm |
Auto Setting Focus, Contrast, Brightness |
Simple S/W Convenient Operation |
Convenient stage movement by 3-axis and able to operate easily and conveniently with mouse control in U.I
Able to get various analysis results with various scan modes measurement tool
Specification
| Resolution | 15nm (30kV, SE Image) |
| Magnification | 20x~60,000x |
| Accelerating Voltage | 1~30kV (1/5/10/15/20/30) |
| Detector | Secondary Electron Image(SE) |
| Electron Gun | Pre-centered Tungsten Filament Cartridge |
| Stage Traverse | 3-axis System (X, Y, R – Manual) |
| X, Y-axis : 40mm / R-axis : 360° | |
| * Image Shift : ±150μm | |
| * Tilt-axis : 0~45° (Option) | |
| Max. Sample Size | 70mm in Diameter x 30mm in Height |
| Automation Function | Auto Start, Auto Focus, |
| Auto Stigmator, Auto Contrast & Brightness | |
| Image Format | BMP, JPEG, PNG, TIFF |
| Vacuum Mode | High Vacuum |
| Vacuum Pump | Rotary Pump / Turbo Molecular Pump (Full Automation) |
| Main Unit | 390(W)x380(D)x560(H)mm, 83kg |
| Controller Unit | 390(W)x325(D)x560(H)mm, 37kg |
| Rotary Pump | 400(W)x160(D)x340(H)mm, 24kg |
Beside these, SNE-3000MS contains EDS system from Bruker Detector. And to improve the result images, it is also optioned with IO sputter device. The sputter device can make the sample surface more rough to spit out more electron.
